Dual-hand 300mm Semiconductor Wafer Robot with Vertical/Horizontal/Rotary Motion
Dual-hand 300mm Semiconductor Wafer Robot with Vertical/Horizontal/Rotary Motion. For Parts or Not Working. Please send the following info. Cosmetic appearance may vary slightly from pictured unit(s). This module is in Good cosmetic condition with minor blemishes from prior use. Some of the polished stainless steel covers are dented/scratched. Many cover screws are missing. There is some debris inside the Z-axis housing, that looks like residue from belt wear. There are also minor scuffs/scratches/dings and handprints all over. This was removed from a decommissioned robot and not tested separately under power. The hands both move in and out easily from their home positions. If the z-axis is lifted a little by hand, the rotation axis is also smooth (if it is not lifted, the z-axis rubs hard on the frame). No other testing was done. No manuals, cords/cables, or additional items are included if not listed or shown. (1) Bundle of cables to connect to the I/O plate shown in photo#6. Supports each wafer at 3 points around the edges. Photo sensors check each location for a wafer. Top module rotates nearly through a full circle. Hands move individually, extend up to 16. Stage moves vertically an estimated 60cm. Photo sensor home switch and mechanical rotation stop on rotating module (bottom of photo #5). Aluminum construction with removable covers. Hands: Aluminum fingers with replaceable KMFA-263483 tips. 2-stage belt drive for vertical travel. Linear motion guide rails for Z axis: NSK LS15. Rotation: NSK M-PS3015KN002 0-240V 157W AC Servo motor. Hand extension: (2) Panasonic MSMD5AZS1S 0-43V 50W AC servo motors. Z (lift): Matsushita (can’t see the model number). E-chain flexible cable management for cables to the stage assembly. For questions regarding this item, please reference the SKU to help us better serve you. DougDeals Terms and Conditions. DougDeals Terms of Use. Items are described to the best of our ability. Items that have not been tested may or may not work properly. Items listed for parts or repair may or may not have additional defects of which we are not aware. DougDeals reserves the right to refuse service to anyone that does not comply with the terms listed and linked here. The sole and exclusive venue for any lawsuit arising out of or relating to this agreement shall be the Travis County Civil Courts of Travis County, Texas. The item “Dual-hand 300mm Semiconductor Wafer Robot with Vertical/Horizontal/Rotary Motion” is in sale since Monday, March 4, 2019. This item is in the category “Business & Industrial\CNC, Metalworking & Manufacturing\Semiconductor & PCB Manufacturing Equipment\Other Semiconductor & PCB Manufacturing”. The seller is “athomemarket” and is located in Leander, Texas. This item can be shipped worldwide.
- Brand: Unbranded
- MPN: DOES NOT APPLY